| ACKNOWLEDGMENTS | 第7-8页 |
| 摘要 | 第8-9页 |
| ABSTRACT | 第9页 |
| CHAPTER 1.INTRODUCTION | 第15-21页 |
| 1.1 Background | 第15-16页 |
| 1.2 Overview of Micro-Motion System | 第16-18页 |
| 1.3 Motivation and Purpose | 第18-19页 |
| 1.4 Thesis Outline | 第19-21页 |
| CHAPTER 2.DESIGN CONCEPT OF STRUCTURE | 第21-30页 |
| 2.1 Development of Algorithm | 第21-26页 |
| 2.2 Concept of Mechanical Design | 第26-29页 |
| 2.2.1 Proposals of mechanical structures | 第26-27页 |
| 2.2.2 Determination of the mechanical structure | 第27-29页 |
| 2.3 The General Design of Control Software | 第29-30页 |
| CHAPTER 3.THE MECHANICAL DESIGN | 第30-55页 |
| 3.1 Selection of Motor | 第30-34页 |
| 3.1.1 Selection of Motor Type | 第30-31页 |
| 3.1.2 Selection of Stepper Motor | 第31-34页 |
| 3.2 Cam-follower Mechanism | 第34-46页 |
| 3.2.1 Introduction of Cam-follower Mechanism | 第35-37页 |
| 3.2.2 Design of Cam-follower Mechanism | 第37-46页 |
| 3.3 Elastic Guide Mechanism(Parallel Leaf-spring Mechanism) | 第46-55页 |
| 3.3.1 Error Resources of Parallel Leaf-Spring Mechanism | 第46-49页 |
| 3.3.2 Design of Parallel Leaf-Spring Mechanism | 第49-55页 |
| CHAPTER 4.THE CONTROL SOFTWARE DESIGN | 第55-66页 |
| 4.1 Principle of Measurement | 第55-57页 |
| 4.2 Stepper Motor Control | 第57-62页 |
| 4.2.1 Motion Curve of Follower | 第57-58页 |
| 4.2.2 The Control of Stepper Motor | 第58页 |
| 4.2.3 Stepper Motor Driver and Controller | 第58-62页 |
| 4.3 Main Program and Graphic User Interface(GUI) | 第62-66页 |
| CHAPTER 5.EXPERIMENT AND THE ANALYSIS OF EXPERIMENTALRESULTS | 第66-78页 |
| 5.1 Experimental Equipments | 第66-68页 |
| 5.2 Measurements and Analysis of Results | 第68-75页 |
| 5.3 Results of Testing New Algorithm | 第75-78页 |
| CHAPTER 6. CONCLUSIONS AND RECOMMENDATIONS | 第78-80页 |
| 6.1 Conclusions | 第78页 |
| 6.2 Recommendations | 第78-80页 |
| REFERENCES | 第80-83页 |
| APPENDIX.LIST OF MAIN PROGRAMS | 第83-84页 |
| 攻读硕士学位期间的学术活动及成果情况 | 第84页 |
