| 摘要 | 第1-6页 |
| ABSTRACT | 第6-8页 |
| ACKNOWLEDGEMENTS | 第8-11页 |
| LIST OF TABLES | 第11-12页 |
| LIST OF FIGURES | 第12-14页 |
| CHAPTER 1 INTRODUCTION | 第14-28页 |
| ·Introduction to BN | 第14-18页 |
| ·Introduction to BCN | 第18-21页 |
| ·Fabrication methods of BCN | 第21-24页 |
| ·Chemical vapor deposition (CVD) | 第21-23页 |
| ·Physical vapor deposition (PVD) | 第23-24页 |
| ·Research of BCN films | 第24-26页 |
| ·Major work of my research | 第26-28页 |
| CHAPTER 2 EXPERIMENTAL AND CHARACTERIZATION METHODS | 第28-37页 |
| ·Introduction of microwave plasma chemical vapor deposition | 第28-31页 |
| ·Introduction of MPCVD equipment | 第29-31页 |
| ·Pretreatment of Si wafer and preparation of BCN nanosheets | 第31-34页 |
| ·Pretreatment of Si wafer | 第32-33页 |
| ·Experimental procedure of growing BCN nanosheets | 第33-34页 |
| ·Characterization | 第34-37页 |
| ·Fourier transform infrared spectra | 第34页 |
| ·Raman and photoluminescence spectra | 第34-35页 |
| ·Scanning electron microscope (SEM) | 第35页 |
| ·Transmission electron microscopy (TEM) | 第35-37页 |
| CHAPTER 3 EFFECTS OF PROCESS PARAMETERS ON GROWTH OF BCN NANOSHEETS | 第37-63页 |
| ·Morphology of BCN nanosheets deposited under different N2 flow rate | 第37-40页 |
| ·Effects of working pressure | 第40-46页 |
| ·SEM images of BCN nanosheets deposited under different working pressure | 第40-42页 |
| ·Raman and FTIR spectra of BCN nanosheets deposited under different working pressure | 第42-46页 |
| ·Effects of DC bias voltage | 第46-49页 |
| ·SEM images of BCN nanosheets deposited under different DC bias voltage | 第46-47页 |
| ·Raman and FTIR spectra of BCN nanosheets deposited under different DC bias voltage | 第47-49页 |
| ·Effects of microwave power | 第49-53页 |
| ·SEM images of BCN nanosheets deposited under microwave power | 第50-51页 |
| ·Raman and FTIR spectra of BCN nanosheets deposited under different microwave power | 第51-53页 |
| ·Effects of BF3/H2 flow rate | 第53-58页 |
| ·SEM images of BCN nanosheets deposited under different BF_3/H_2 flow rate | 第53-55页 |
| ·Raman and FTIR spectra of BCN nanosheets deposited under different BF3/H2 flow rate | 第55-58页 |
| ·Effects of CH4 flow rate | 第58-61页 |
| ·SEM images of BCN nanosheets deposited under different CH_4 flow rate | 第58-60页 |
| ·Raman and FTIR spectra of BCN nanosheets deposited under different CH4 flow rate | 第60-61页 |
| ·Conclusion | 第61-63页 |
| CHAPTER 4 GROWTH MECHANISM AND PHOTOLUMINESCENCE PROPERTIES OF BCN NANOSHEETS | 第63-73页 |
| ·Structure feature of BCN nanosheets with smooth surface | 第63-64页 |
| ·A growth mechanism of BCN nanosheets | 第64-70页 |
| ·Photoluminescence properties of BCN nanosheets | 第70-72页 |
| ·Conclusion | 第72-73页 |
| CONCLUSION | 第73-75页 |
| REFERENCES | 第75-80页 |
