| 摘要 | 第1-10页 |
| Abstract | 第10-11页 |
| Chapter 1:Introduction | 第11-44页 |
| ·Ultrasonic imaging and its development | 第11-15页 |
| ·Development of ultrasonic phased arrays | 第11-12页 |
| ·Ultrasonic imaging | 第12-15页 |
| ·High-frequency ultrasonic imaging | 第15-19页 |
| ·Imaging resolution | 第15-16页 |
| ·Acoustic microscopy | 第16-18页 |
| ·Development of high-frequency ultrasonic phased arrays | 第18-19页 |
| ·Theory of ultrasonic phased array | 第19-27页 |
| ·Principle of ultrasonic phased array | 第19-23页 |
| ·Some particularities of high frequency arrays | 第23-27页 |
| ·Different techniques for the fabrication of ultrasonic arrays | 第27-41页 |
| ·Conventional arrays fabrication technologies | 第28-30页 |
| ·High-frequency arrays based on MEMS technologies | 第30-35页 |
| ·cMUT pMUT and mMUT | 第35-40页 |
| ·Laser technique | 第40-41页 |
| ·Summary and outline of the thesis | 第41-44页 |
| Chapter 2:Acoustic Waves in Elastic Media and Fundamentals ofPiezoelectric Ultrasonic Transducers | 第44-70页 |
| ·Waves propagation in fluid,solid and piezoelectric materials | 第44-58页 |
| ·Waves equation in fluids | 第44-45页 |
| ·Waves equation in solid materials | 第45-47页 |
| ·Waves equation in piezoelectric materials | 第47-52页 |
| ·Numerical solution of Christoffel equation for analysis of material elasticity and piezoelectricity | 第52-58页 |
| ·Modelling and characteristics of piezoelectric transducers | 第58-68页 |
| ·KLM model | 第59-60页 |
| ·Electrical impedance and electrical matching | 第60-63页 |
| ·Acoustic impedance and mechanical matching | 第63-68页 |
| ·Summary | 第68-70页 |
| Chapter 3:Finite Element Modeling of Piezoelectric Ultrasonic ArrayTransducers | 第70-102页 |
| ·Finite element formalism using COMSOL | 第71-88页 |
| ·PDE and COMSOL formalism | 第72-73页 |
| ·Sources of excitation | 第73页 |
| ·Boundary conditons | 第73-80页 |
| ·Simulation examples | 第80-88页 |
| ·Simulation of buffered transducer arrays | 第88-100页 |
| ·2-D simulation in x-y plane(simulation of array transducer with a buffer layer) | 第89-97页 |
| ·2-D simulation in z-y plane(simulation of single element transducer with a focal lens) | 第97-100页 |
| ·Summary | 第100-102页 |
| Chapter 4:LiNbO_3-based array fabrication and characterization | 第102-128页 |
| ·Simulation of backing transducer arrays | 第103-112页 |
| ·Model design | 第103-105页 |
| ·Beam behaviour | 第105-112页 |
| ·Investigation of etching LiNbO_3 36°/Y-cut arrays | 第112-119页 |
| ·Focusing Ion Beam(FIB) | 第113-115页 |
| ·Inductively Coupled Plasma(ICP)Reactive Ion Etching(RIE) | 第115-119页 |
| ·Fabrication of LiNbO_3 36°/Y-cut transducer array on silicon | 第119-123页 |
| ·Process flow | 第119-121页 |
| ·Fabricated array transducers | 第121-123页 |
| ·Discussion of fabricated patterns | 第123页 |
| ·Characterization of LiNbO_3 36°/Y-cut transducer array | 第123-126页 |
| ·Measurement method | 第123-125页 |
| ·Measured results | 第125-126页 |
| ·Summary | 第126-128页 |
| Chapter 5:ZnO-based array fabrication and characterization | 第128-150页 |
| ·Fabrication of ZnO-based transducer array using wet etching method | 第129-140页 |
| ·Geometry design | 第130页 |
| ·Fabrication of thick-film ZnO transducer arrays | 第130-136页 |
| ·Discussion of fabricated patterns | 第136页 |
| ·Characterization of thick-film ZnO transducer arrays | 第136-139页 |
| ·Summary | 第139-140页 |
| ·A novel method for fabrication of piezoelectric transducer arrays on Si substrate | 第140-150页 |
| ·Fabricati on of thick-film ZnO transducer arrays | 第140-144页 |
| ·Discussion of fabricated patterns | 第144页 |
| ·Characterization of thick-film ZnO transducer arrays | 第144-146页 |
| ·Improvement of sputtering process with rotation 90° | 第146-148页 |
| ·Discussion of fabricated patterns using rotation method | 第148-149页 |
| ·Summary | 第149-150页 |
| Conclusions and perspectives | 第150-154页 |
| Annex 1:Calculation of phase delay | 第154-158页 |
| Annex 2.1:Parameters of the used materials | 第158-161页 |
| Annex 2.2:Material tensor transsformations | 第161-166页 |
| Annex 2.3:Material velocity(or slowness)surfaces and electromechanical coupling coefficient k_t | 第166-167页 |
| References | 第167-179页 |
| Acknowledgments | 第179-180页 |
| List of Publications | 第180-182页 |
