| 摘要 | 第5-7页 |
| ABSTRACT | 第7-8页 |
| Chapter 1 Introduction | 第16-24页 |
| 1.1 Research Background and Significance | 第16-17页 |
| 1.2 State of Arts | 第17-21页 |
| 1.3 Contents and motivations of thesis | 第21-22页 |
| 1.4 Outline of thesis | 第22-24页 |
| Chapter 2 Theoretical basics | 第24-45页 |
| 2.1 Piezoelectricity Theory and Piezoelectric MEMS Resonators | 第24-27页 |
| 2.1.1 Piezoelectricity: early application and principles | 第24-25页 |
| 2.1.2 Piezoelectricity: mathematical expression | 第25-26页 |
| 2.1.3 Types of piezoelectric materials | 第26-27页 |
| 2.2 Resonator mechanical-electrical model and equivalent electrical parameter | 第27-33页 |
| 2.2.1 One-port resonator model | 第29-31页 |
| 2.2.2 Two-port resonator Model | 第31-33页 |
| 2.3 Phononic Crystals | 第33页 |
| 2.3.1 Introduction | 第33页 |
| 2.3.2 Crystallography arrangement | 第33页 |
| 2.4 Theory of phononic crystals | 第33-39页 |
| 2.4.1 Energy band structure, Bloch theorem, theory and mechanism of openingband gap | 第34-35页 |
| 2.4.2 Phononic Crystals categories | 第35-39页 |
| 2.5 Phononic Crystal application in MEMS based devices | 第39-43页 |
| 2.5.1 Phononic Crystals-based support tethers configuration | 第40-41页 |
| 2.5.2 Phononic Crystals -based resonators | 第41-42页 |
| 2.5.3 Phononic Crystals-based waveguide and filters | 第42-43页 |
| 2.6 Reflectors | 第43-45页 |
| Chapter 3 Thin-film piezoelectric-on-substrate technology and simulation tools | 第45-69页 |
| 3.1 Introduction | 第45-46页 |
| 3.2 Piezoelectric on Substrate | 第46页 |
| 3.3 Figure-of-merit of performance of MEMS resonators | 第46-54页 |
| 3.3.1 Quality Factor | 第46-48页 |
| 3.3.2 Power Handling | 第48-50页 |
| 3.3.3 Resonant frequency | 第50-51页 |
| 3.3.4 Motional resistance | 第51-52页 |
| 3.3.5 Nonlinearity | 第52-53页 |
| 3.3.6 Frequency stability | 第53-54页 |
| 3.4 Thin-film-piezoelectric-on-silicon based MEMS resonators | 第54-56页 |
| 3.5 Total Quality factor and Anchor Quality Factor | 第56-57页 |
| 3.6 Energy loss mechanisms in MEMS resonator | 第57-60页 |
| 3.6.1 Anchor loss | 第58页 |
| 3.6.2 Thermo-elastic loss | 第58-59页 |
| 3.6.3 Electrode loss | 第59页 |
| 3.6.4 Interface loss | 第59-60页 |
| 3.6.5 Material loss | 第60页 |
| 3.6.6 Air loss | 第60页 |
| 3.7 Band gap, dispersion curves and power transmission spectra in PnC | 第60-62页 |
| 3.8 analysis tools for acoustic wave propagation and MEMS devices | 第62-64页 |
| 3.8.1 Plane Wave Expansion method | 第62-63页 |
| 3.8.2 Finite-Difference Time-Domain method | 第63页 |
| 3.8.3 Simulation tool based on finite element method (FEM) | 第63-64页 |
| 3.9 COMSOL Multiphysics | 第64-69页 |
| 3.9.1 Eigenfrequency analysis | 第67页 |
| 3.9.2 Frequency domain analysis | 第67-68页 |
| 3.9.3 Parametric sweep | 第68-69页 |
| Chapter 4 Designing and Simulation Results of Cross-shaped PnC for anchor lossreduction of thin-film ALN-on-silicon high frequency MEMS resonator | 第69-88页 |
| 4.1 Introduction | 第69-70页 |
| 4.2 Thin-film ALN-on-silicon high frequency MEMS resonator design | 第70-71页 |
| 4.3 Summary of design parameters | 第71-72页 |
| 4.4 Simulation results and discussion | 第72-81页 |
| 4.4.1 Eigenmode shapes of the resonators | 第72-73页 |
| 4.4.2 Band gaps in cross-shaped PnC structure | 第73-79页 |
| 4.4.3 Band gab calculation | 第79页 |
| 4.4.4 Quality factor of the resonators | 第79-80页 |
| 4.4.5 Harmonic response of the resonator | 第80-81页 |
| 4.5 T-shape PnC with lattice constant a=20μm | 第81-83页 |
| 4.6 T-shaped PnC with lattice constant a=5μm | 第83-84页 |
| 4.7 T-shaped PnC with lattice constant a=10μm | 第84-85页 |
| 4.8 Applying T-shape PnC on the Resonator | 第85页 |
| 4.9 Harmonic response of the resonator | 第85-86页 |
| 4.10 Conclusion | 第86-88页 |
| Chapter 5 Conclusions | 第88-90页 |
| 5.1 Concluding Remarks | 第88页 |
| 5.2 Future work | 第88-90页 |
| Acknowledgements | 第90-91页 |
| References | 第91-104页 |
| Research Result Obtained During the Study for Master Degree | 第104页 |
