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多弧离子镀制备纳米复合自润滑Ti1-xAlxN/MoN多层膜及其结构与性能研究

Abstract第3-4页
Acknowledgements第6-16页
中文摘要第16-24页
Chapter 1 Introduction第24-34页
    1.1 Scope and objectives of Study第31-34页
Chapter 2 Literature review and contextual background第34-58页
    2.1 Composite materials第34-36页
    2.2 nanocomposite materials第36-40页
    2.3 Hard coatings第40页
    2.4 Factors effecting hardness第40-50页
        2.4.1 Grain-Size refinement第41-42页
        2.4.2 Grain-boundary refinement第42-45页
        2.4.3 Solid-state solution and precipitation第45-47页
        2.4.4 Ion bombardment第47-48页
        2.4.5 Multilayer coatings第48-50页
    2.5 Young's modulus第50-51页
    2.6 Hard coatings with a low friction lamellar第51-52页
    2.7 Hard coatings incorporating lubricious phase as multilayers第52-55页
    2.8 Material selection第55-56页
    2.9 Methodology第56-58页
Chapter 3 Deposition and experimental techniques第58-77页
    3.1 Physical vapor deposition (PVD)第58-60页
    3.2 Cathodic arc ion plating (CAIP)第60-65页
        3.2.1 Cathodic arc sources第63页
        3.2.2 Cathodic arc emission characteristics第63-64页
        3.2.3 Micro-droplets第64-65页
    3.3 Experimental setup第65-77页
        3.3.1 Cathodic arc chamber第65-66页
        3.3.2 Substrate preparation第66页
        3.3.3 Nano-indentation measurements第66-69页
        3.3.4 X-ray diffraction第69页
        3.3.5 Low-angle XRD第69-70页
        3.3.6 X-ray photoelectron spectroscopy (XPS)第70-71页
        3.3.7 Transmission electron microscopy (TEM)第71-73页
        3.3.8 High resolution transmission electron microscopy(HRTEM)第73-74页
        3.3.9 Scanning electron microscope (SEM)第74-75页
        3.3.10 Friction and wear rate testing第75页
        3.3.11 Surface topography第75页
        3.3.12 Optical profilometry第75页
        3.3.13 Scratch and adhesion testing第75-77页
Chapter 4 Experiment Ⅰ Influence of SRS on the structure and mechanical properties of nanocrystalline Ti_(0.33)Al_(0.67)N/MoN coatings synthesized by CAIP第77-91页
    4.1 Introduction第77-78页
    4.2 Experimental details第78-79页
    4.3 Results and discussions第79-91页
Chapter 5 Experiment Ⅱ Effect of (∧) on structural and mechanical properties of nanocomposite Ti_(0.70)Al_(0.30)N/MoN nanomultilayer films synthesized by CAIP第91-108页
    5.1 Introduction第91-92页
    5.2 Experimental details第92-95页
    5.3 Results and discussions第95-108页
Chapter 6 Experiment Ⅲ Dependence of structural and mechanical properties of nanocomposite Ti_(0.50)Al_(0.50)N/MoN thin films on bilayer period (∧) synthesized by CAIP第108-125页
    6.1 Introduction第108-110页
    6.2 Experimental details第110-112页
    6.3 Results and discussion第112-125页
Chapter 7 Conclusions第125-129页
    7.1 Future Work第128-129页
References第129-142页
Publications第142-143页

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