| 摘要 | 第4-6页 |
| Abstract | 第6-7页 |
| 1 INTRODUCTION AND LITERATURE REVIEW OF MEMS/) NEMS AND C-ME MS/NEMS FABRICATION | 第10-42页 |
| 1.1 Project Financial Support | 第10页 |
| 1.2 Electromechanical Systems Evaluation | 第10-13页 |
| 1.3 Conventional Micro-Fabrication Approaches | 第13-14页 |
| 1.4 Novel Microfabrication Techniques and Supplies(C-MEMS) | 第14页 |
| 1.5 Important Role of Carbonized Photoresist Shrinkage and Electrical Properties in C-MEMS | 第14-16页 |
| 1.6 C-MEMS Prologue | 第16-19页 |
| 1.7 Stimulus Advances | 第19-20页 |
| 1.8 C-NEMS Technology and Miniaturization Impact | 第20-21页 |
| 1.9 C-MEMS/NEMS Biological Aspects | 第21-37页 |
| 1.10 Recent Nanotechnology Applications in Cancer Detection | 第37-40页 |
| 1.11 Conclusion | 第40-42页 |
| 2 FLUX BASED FABRICATION OF SILICON DEEP TRENCH STRUCTURES FOR MEMS | 第42-56页 |
| 2.1 Introduction | 第42-44页 |
| 2.2 Process Modeling | 第44-47页 |
| 2.3 Surface Flux Distribution Models | 第47-50页 |
| 2.4 Simulation Results and Discussion | 第50-55页 |
| 2.5 Conclusion | 第55-56页 |
| 3 MULTI-LAYER C-MEMS/NEMS FABRICATION PROCESS | 第56-76页 |
| 3.1 Literature Review | 第56-58页 |
| 3.2 Processes and Materials | 第58-59页 |
| 3.3 Fabrication Procedure | 第59-65页 |
| 3.4 Multilayer SU-8 Structures Growth | 第65-69页 |
| 3.5 Fabricated C-MEMS Multilayered Structural Applications | 第69-72页 |
| 3.6 Discussion | 第72-75页 |
| 3.7 Conclusion | 第75-76页 |
| 4 DESIGN AND FABRICATION OF DEP-BASED C-MEMS FOR MANIPULATION OF BIOPARTICLES | 第76-98页 |
| 4.1 Introduction and Literature Review | 第76-85页 |
| 4.2 Author Majn Objective | 第85-87页 |
| 4.3 Modeling of 3D Dielectrophresis | 第87-89页 |
| 4.4 DEP-Modelingfor Multishape Microelectrodes Array | 第89-93页 |
| 4.5 Design of 3D Carbon Circular Microelectrode Array | 第93-95页 |
| 4.6 Design of 3D Carbon Multi-shaped Microelectrode Array | 第95-96页 |
| 4.7 Conclusion | 第96-98页 |
| 5 OPTIMIZATION OF DEP-BASED C-MEMS/NEMS STRUCTURES | 第98-121页 |
| 5.1 Results and Discussions Based on Circular Column Microelectrode Array | 第98-100页 |
| 5.2 Results and Discussions Based on Square Column Microelectrode Array | 第100-105页 |
| 5.3 Combined Simulation Analysis of 3D Carbon Circular,Square (90° Edge),and Triangular(Flat/Sharp)Extruded Microelectrode Array Designs | 第105-118页 |
| 5.4 Process Development of Carbon-MEMS/NEMS | 第118-119页 |
| 5.5 Conclusion | 第119-121页 |
| 6 SUMMARY AND CONCLUSION | 第121-125页 |
| Acknowledgments | 第125-128页 |
| References | 第128-147页 |
| PUBLICATIONS | 第147-148页 |
